The PiezoMEMS Workshop is essentially an industry forum for scientists and engineers. However, students who see their future in the PiezoMEMS world are also welcome to exchange ideas. They can all look forward to a program about the countless applications. Please note that the workshop is not hybrid, so the presentations can only be heard on site.

Program finalized

We are pleased to announce that we have filled the available timeslots with excellent presentations from industry and research. There will again be a focus on deposition methods of PZT, AlN and ALScN, the latest characterization methods, as well as news in the field of devices and activities of leading foundries and research organizations.

Here you can see the final program, which will once again cover everything to do with piezoelectric MEMS this year.

For the first time during the PiezoMEMS workshop: The poster session

For the first time in the history of the piezoMEMs workshop, we are planning a poster session.

This will give us the opportunity to highlight other interesting news and aspects in addition to the presentations and serve as a breeding ground for intensive discussions.

If you are interested, please submit your abstract to


  • March 18, 2024
    Arrival of the attendees
    6:00 p.m. to 8:00 p.m - Welcome reception and registration
    Super C, Templergraben 57, 52062 Aachen, Germany

    This will be followed by a guided tour of the city at nightfall.

  • March 19, 2024
    First workshop day / Conference dinner
    8:00 a.m. to 5:00 p.m
    Super C, Templergraben 57, 52062 Aachen, Germany

    Conference dinner
    From 6:00 p.m.
    Museum Zinkhütter Hof, Cockerillstraße 90, 52222 Stolberg, Germany

    Shuttle service provided
  • March 20, 2024
    Second workshop day
    8:00 a.m. to 4:40 p.m
    Super C, Templergraben 57, 52062 Aachen, Germany

    After the end of the conference, participants will be able to visit the city hall.